Exhibitor Seminars
ETSI10
Interpreter
TechSPOT INNOVATION and IOT, East Hall 3, TOKYO BIG SIGHT
13:40-14:30 Thu., 13-Dec
Statistical process control in compound semiconductor manufacturing by Attolight cathodoluminescence
Sponsored by
Session Description
We will introduce example applications where cathodoluminescence (CL) can be used to detect defects in III-V manufacturing, R&D and failure analysis. Finally, we will introduce the Santis 300 full wafer CL tool, discuss particular use cases and highlight potential and flexibility in III-V and R&D.
Program Agenda
Tokyo Instruments, Inc.