Exhibitor Seminars
ETSI02
Interpreter
TechSPOT INNOVATION and IOT, East Hall 3, TOKYO BIG SIGHT
11:20-12:10 Wed., 12-Dec
SEMI Factory Automation Standards, the Enabler of Smarter Fab Operation
Sponsored by
Session Description
This session introduces SEMI Standards "GEM300 and EDA (equipment data acquisition)" that has been making semiconductor manufacturing line smarter, also introduces recently developed "SEMI E170 Secured Foundation Of Recipe Management System".
Program Agenda
SEMI Standards: Information & Control