Exhibitor Seminars
ETSE05
Interpreter
TechSPOT Exhibitor Seminars, East Hall 4, TOKYO BIG SIGHT
15:00-15:50 Wed., 12-Dec
Introductions of innovative total solutions in the sub-fab area and Kanken Techno abatement systems
Sponsored by
Session Description
The innovative systems in the sub-fab area are introduced to solve the clogging problem by the powder in the piping between the process tool and the abatement system. The uptime will be increase using this system. And the line-up of the abatement systems of Kanen Techno is also introduced.
Program Agenda
Kanken Techno.Co.,Ltd.