Exhibitor Seminars
ETSE09
Interpreter
TechSPOT Exhibitor Seminars, East Hall 4, TOKYO BIG SIGHT
Thu., 14-Dec
‘’Mirelis’’ for non-destructive inspection of crystal defects and latent scratches in SiC wafers.
Sponsored by
Session Description
SiC power devices contribute to power loss reduction, however, crystal defects and latent scratches in SiC wafers negatively impact manufacturing yield and reliability, resulting in high prices. We have introduced a Mirror Electron Inspection System to realize a non-destructive inspection of SiC wafers.
Program Agenda
Hitachi High-Technologies Corp.