Exhibitor Seminars
ETSE13
Interpreter
TechSPOT Exhibitor Seminars, East Hall 4, TOKYO BIG SIGHT
Fri., 15-Dec
Safely Managing Dielectric CVD Process Tool Exhausts for Minimum Cost
Sponsored by
Session Description
Safely managing the exhaust gas of dielectric CVD process tools remains an important issue, especially with continued pressure on costs and the pending increase in competition, particularly in 3D NAND and DRAM, as new factories become established in China.
Program Agenda
Edwards