Exhibitor Seminars
ETSE15
Interpreter
TechSPOT Exhibitor Seminars, East Hall 4, TOKYO BIG SIGHT
Fri., 15-Dec
Matching methodology for CD-SEM.
Sponsored by
Session Description
Last year, Hitachi High-Technologies Corporation developed and announced CD-SEM CS4800. We received requests from customers who introduced CS4800 regarding matching with old tools that they are using. In this seminar, we will explain the method of recipe matching and CD matching between CS4800 and old tools in order to respond to the request.
Program Agenda
Hitachi High-Technologies Corp.