Exhibitor Seminars
TSS5
Interpreter
TechSTAGE SOUTH, East Hall 1, TOKYO BIG SIGHT
12:50-14:30 Thu., 15-Dec
Sustainable Manufacturing & High Tech Facility Forum (1)
Towards Increased Efficiency Through Reduced Energy Consumption
Sponsored by
Session Description
Conforming to environmental regulations, coping with natural disasters such as fires and earthquakes, enhancing fabrication efficiency and other challenges relating to sustainable manufacturing are common problems across the industry.
SEMI Japan strives to create opportunities for member companies and others to engage in technological exchange with end users, building links with branches of SEMI in other countries.
This forum examines environmental, health, and safety (EHS) issues, focusing not only on energy savings in individual fields, but also on the needs of end users and solution technologies suppliers offer, from the viewpoint of enhancing fabrication efficiency.
Program Agenda
Tsukasa Satake, HORIBA, Ltd.
Toshiya Matsuda, Tokyo Electron Limited
Takashi Futatsuki, ORGANO CORPORATION
12:50-12:55
Introduction
Tsukasa Satake
Quality Management Center
Junior Corporate Officer, Division Manager
HORIBA,Ltd.
12:55-13:20
Technology innovations for energy management of semiconductor FABs
Akimichi Yonekura
Productivity Improvement Planning Division
General Manager
Toshiba Corporation Storage & Electronic Devices Solution Company
Manufacturing process of semiconductor devices expend a huge amount of energy. Therefore, many energy saving technologies were introduced to manufacturing line by now, and we made a great effort to maximize the efficiency of energy usage.
In this discourse, recognize how much energy we use in wafer FAB, and review the technologies we already introduced. Final part provide the direction of further energy saving technology.
13:20-13:45
Environmental plan "Road to Zero" and Energy saving activities on Semiconductor manufacturing site.
Tetsuya Kitagawa
Planning & Control Division, Strategy Planning Department
Chief Manager
Sony Semiconductor Solutions Corporation
Kenichiro Shii
Kagoshima Facility Dept. Facility Div.
Chief Assistant Manager
Sony Semiconductor Manufacturing Corporation
Sony group companies are behind the "Road to Zero" environmental plan, which aims for a zero environmental footprint. Road to Zero sets a series of specific goals based on four environmental perspectives, and six product life cycle stages. In order to accelerate our environmental activities, Sony has now established the "Green Management 2020" environmental targets (achievement year: FY2020).
However it is difficult to achieve Road to Zero by simply following up with the current measures. Especially in Electronics business, higher production of device manufacturing tends to mean higher GHG emissions.
Sony semiconductor manufacturing factories have been working on energy saving activities to contribute environmental measures for years and recently it is getting harder to reduce energy consumption efficiently.
In this presentation, we present one of our continuous energy saving activities on semiconductor manufacturing site to show how we are coping with the target of Sony Road to Zero.
13:45-14:20
Assessment of the SEMI energy conversion factor and its application for semiconductor and LCD fabs
Shih-Cheng Hu
Distinguished Professor
Dept of Energy, Refrigeration and Air-Conditioning Engineering
National Taipei University of Technology
High-tech fabrication plants (namely fabs) always use a lot of energy. The process tool in the fab generally uses electricity directly during its operating and it also consumes the energy indirectly through a variety of other facilities (or called sub-systems). The Semiconductor Equipment and Materials International (SEMI) issued the guidelines (called SEMI S23) for energy, electricity, and production conservation for the facility systems. The latest version is the SEMI S23-0813, published in 2013. This study develops the calculator for the energy conversion factors (ECFs) in the fab. The results show that most of the ECF values estimated by the present calculator are very close to the values reported in the SEMI S23-0813 while applying the same operating conditions. Most importantly, we can further understand the detailed contribution of each variable to the energy consumption of each sub-system in the fab, such as the exhaust, clean dry air, and process cooling water systems. The present ECF calculator can eliminate the drawback of the SEMI S23-0813 that cannot objectively compare the results for different industries or under different operating conditions. Such the ECF calculator can be used as the straightforward tool for the energy-saving task or a new fab design. Moreover, the present study successfully employs this calculator to analyze the energy consumption of three semiconductor manufacturing and LCD fabs in detail. The analytical results further indicate that the efficiency of the energy use in the studied old-generation wafer fab (using 200-mm wafers) can be further improved by modifying some utilities, such as the air compressor and chilled water systems.
14:20-14:30
N2O, Global Warming or Acid rain?
Mike Czerniak
Environmental Solutions Business Development Manager
Marketing
Edwards
Nitrous oxide is widely used in the Semiconductor industry as a mild oxidising agent. However its potential impact as a global warming gas has been recognised and there is growing interest in reducing emissions of this gas to atmosphere. Fortunately this gas can be removed by combustion, but often at the expense of transforming it into mono-nitrogen oxides, usually designated NOx, which are harmful to humans and contribute to acid rain. NOx removal is possible but adds expense and complexity. However, by suitable adjustment of the combustion conditions, NOx formation can be minimised, which negates the need for additional treatment. The issues and chemistry are discussed.