Exhibitor Seminars
ETSE15
Exhibitor Seminar Room B, 2F, West Exhibition Hall, Tokyo Big Sight
15:00-15:50 Thu., 12-Dec
Introduction of reticle/mask particle inspection system and spectroscopic analysis of semiconductor
Sponsored by
Session Description
We will Introduce the new functions installed in the particle detection system PR-PD3, which is highly succeeded in many customers. In addition, we will also propose the examples of semiconductor material evaluation using spectroscopic techniques such as Raman and Ellipsometry etc.
Program Agenda
HORIBA, Ltd.