Exhibitor Seminars
ETSE12
Exhibitor Seminar Room B, 2F, West Exhibition Hall, Tokyo Big Sight
15:00-15:50 Wed., 11-Dec
Wafer profile measurement (GBIR / ESFQD ) realized with load port film thickness meter
Sponsored by
Session Description
Otsuka Electronics has developed the new thickness meter called GS-300 which enables TTV 100nm measurement and provides profile feedbacks to the SPE to improve flatness. The key features and applications will be introduced along with our other product lineups.
Program Agenda
Otsuka Electronics Co., Ltd.