Exhibitor Seminars
ETSE04
Exhibitor Seminar Room A, 2F, West Exhibition Hall, Tokyo Big Sight
11:20-12:10 Thu., 12-Dec
HORIBA's plasma measurement technologies and applications in semiconductor manufacturing processes
Sponsored by
Session Description
Plasma conditions management is an essential element for process optimization and yield improvement.
HORIBA introduces applications such as plasma conditions measurement, measurement, and endpoint monitoring.
Program Agenda
HORIBA STEC, Co., Ltd.